HVA's Annual Fall Sale! Free Valve with Every Purchase of 10!

HVA's Annual Fall Sale is here! This year for every 10 valves you buy we will throw in a free valve. If you order 100 valves you'll get an extra 10 valves free!

 

 

This promo begins Nov 1st and goes thru the end of the year and is open to all of our customers. Request your quote today! http://www.highvac.com/quote-request.php

New 13000 Series Laminar Flow Valve

The HVA 13000 Series Laminar Flow Gate Valve features a laminar flow port orifice that effectively seals the valve mechanism from the gas stream. For additional protection, purge ports are installed in both the upper and lower body areas to allow an insert gas flow to prevent intrusion of the process gas into these areas. Extensive semiconductor applications have proven these valves to be a valuable asset in process systems. Laminar flow valves may be used in etching, CVD and any other process that uses highly corrosive gases which may be damaging to other valves.

Internal Isolation - Flow orifice isolates all internal parts from flow path

Positive Shutoff - Maintains sealing integrity upon pressure/power failure

Smooth Movement - PTFE material allows laminar port to glide with ease

Corrosion Resistant - Withstands constant infusion of process gases

 

 Download Data Sheet: http://www.highvac.com/products/13000.php
Request Quot: http://www.highvac.com/quote-request.php

Vacuum Valves - Functions & Uses

Three main functions of Vacuum Valves

-          Isolate vacuum volumes from pumps

-          Control gas flow to achieve a particular pressure

-          Enable transfer of objects between vacuum volumes

Gate Valves

-          Isolation between vacuum volume (chamber) and pump (roughing, scroll, turbo, diffusion, cryo, ion)

-          Isolation between chamber and load lock during sample introduction

-          Access between chamber and load lock during sample transfer

-          Isolation between synchrotron (also cyclotron and accelerators) beam lines and experimental stations

-          Applications/Processes:

o   Semiconductor, Solar, LED, BioPharm, PVD, CVD, MOCVD, PECVD, Coating/Thin Film, Etching, MBE, R&D, Vacuum Furnaces, Food Processing, Anything needing vacuum, Atomic physics research, Fusion research, NASA, Military defense

HVA Series: 11000 S/S gate, 81000 AL gate, 21200 S/S Mil Cycle gate,

                    16000 shielded gate, 21700 3-position gate,

                    71000 harsh process gate, 78000 window gate,

                    New throttle gate

 

 

Slit/Rectangular/Transfer/Door Valves

-          Isolation between chamber and load lock during sample introduction

-          Access between chamber and load lock during sample transfer

-          Applications/Processes:

o   Semiconductor, Solar, LED, PVD, CVD, MOCVD, PECVD, Coating/Thin Film, Etching, R&D, Flat Panel Display, CIGS (manufacture of solar cells)

HVA Series: 28200 S/S slit, 88200 AL slit, 89200 door, New “I” motion slit,

          New “L” motion slit

 

Angle/Inline Valves

-          Rough pumping shut-off

-          Foreline switching between pumps

-          Cryo-sorption pump shut-off

-          Isolating foreline traps

-          UHV shut-off

-          Sorption trap isolation

-          Isolating sections baked to high temperature

-          Applications/Processes:

o   Semiconductor, Solar, LED, BioPharm, PVD, CVD, MOCVD, PECVD, Coating/Thin Film, Etching, MBE, R&D, Vacuum Furnaces, Food Processing, Anything needing vacuum, Atomic physics research, Fusion research, NASA, Military defense

HVA Series: 4000 angle valve, 5000 inline valve

 

 

Ball Valves

-          Rough vacuum pressures

-          Foreline

-          Traps

-          Applications/Processes:

o   Semiconductor, Solar, LED, BioPharm, PVD, CVD, MOCVD, PECVD, Coating/Thin Film, Etching, MBE, R&D, Vacuum Furnaces, Food Processing, Anything needing vacuum, Atomic physics research, Fusion research, NASA, Military defense

 

HVA Series: BL ball valve