The HVA 13000 Series Laminar Flow Gate Valve features a laminar flow port orifice that effectively seals the valve mechanism from the gas stream. For additional protection, purge ports are installed in both the upper and lower body areas to allow an insert gas flow to prevent intrusion of the process gas into these areas. Extensive semiconductor applications have proven these valves to be a valuable asset in process systems. Laminar flow valves may be used in etching, CVD and any other process that uses highly corrosive gases which may be damaging to other valves.
Internal Isolation - Flow orifice isolates all internal parts from flow path
Positive Shutoff - Maintains sealing integrity upon pressure/power failure
Smooth Movement - PTFE material allows laminar port to glide with ease
Corrosion Resistant - Withstands constant infusion of process gases
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http://www.highvac.com/products/13000.php
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PTFE compounds, spring types, and lip configurations, these seals can be designed to meet the requirements of the most demanding seal environments.
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