Three
main functions of Vacuum Valves
-
Isolate vacuum volumes from pumps
-
Control gas flow to achieve a
particular pressure
-
Enable transfer of objects between
vacuum volumes
Gate
Valves
-
Isolation between vacuum volume
(chamber) and pump (roughing, scroll, turbo, diffusion, cryo, ion)
-
Isolation between chamber and load
lock during sample introduction
-
Access between chamber and load lock
during sample transfer
-
Isolation between synchrotron (also
cyclotron and accelerators) beam lines and experimental stations
-
Applications/Processes:
o
Semiconductor, Solar, LED, BioPharm,
PVD, CVD, MOCVD, PECVD, Coating/Thin Film, Etching, MBE, R&D, Vacuum
Furnaces, Food Processing, Anything needing vacuum, Atomic physics research,
Fusion research, NASA, Military defense
HVA
Series: 11000 S/S gate, 81000 AL gate, 21200 S/S Mil Cycle gate,
16000 shielded gate, 21700
3-position gate,
71000 harsh process gate,
78000 window gate,
New throttle gate
Slit/Rectangular/Transfer/Door
Valves
-
Isolation between chamber and load
lock during sample introduction
-
Access between chamber and load lock
during sample transfer
-
Applications/Processes:
o Semiconductor,
Solar, LED, PVD, CVD, MOCVD, PECVD, Coating/Thin Film, Etching, R&D, Flat
Panel Display, CIGS (manufacture of solar cells)
HVA
Series: 28200 S/S slit, 88200 AL slit, 89200 door, New “I” motion slit,
New “L” motion slit
Angle/Inline
Valves
-
Rough pumping shut-off
-
Foreline switching between pumps
-
Cryo-sorption pump shut-off
-
Isolating foreline traps
-
UHV shut-off
-
Sorption trap isolation
-
Isolating sections baked to high
temperature
-
Applications/Processes:
o
Semiconductor, Solar, LED, BioPharm,
PVD, CVD, MOCVD, PECVD, Coating/Thin Film, Etching, MBE, R&D, Vacuum
Furnaces, Food Processing, Anything needing vacuum, Atomic physics research,
Fusion research, NASA, Military defense
HVA
Series: 4000 angle valve, 5000 inline valve
Ball
Valves
-
Rough vacuum pressures
-
Foreline
-
Traps
-
Applications/Processes:
o
Semiconductor, Solar, LED, BioPharm,
PVD, CVD, MOCVD, PECVD, Coating/Thin Film, Etching, MBE, R&D, Vacuum
Furnaces, Food Processing, Anything needing vacuum, Atomic physics research,
Fusion research, NASA, Military defense
HVA
Series: BL ball valve
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